3、MEMS光学多参数集成原位传感器
开展蓝宝石基MEMS光学多参数集成原位传感器的设计和加工,集温度-噪声-振动于一体的传感结构,该结构利用蓝宝石光栅布拉格波长的温度敏感性实现温度测量,通过声波压缩空气介质,折射率变化引起法珀腔谐振频率漂移实现噪声测量,基于键合质量块和石英玻璃的法珀腔振动传感结构,通过质量块位移引起法珀腔谐振频率漂移实现振动测量,该集成原位传感器具有耐高温、紧凑型、参数无交叉干扰等特点,可解决航天极端和复杂环境下的多物理场测量的难题。
支撑该方向的研究课题有国家自然基金重点项目、军科委重点基金、山西省优青项目等国家和省部级项目,经费充足,通过该项目研究,学生可探索光学传感未知的奥妙,体验光学漂移的无穷乐趣,熟悉微纳加工中心的工艺流程,掌握飞秒激光器、半导体激光器、磁控溅射机、深硅刻蚀、光刻机、扫描电子显微镜等先进高端设备、掌握Comsol、Rsfot、Matlab、Origin等数值建模仿真软件,参加国际国内会议,具有直博、读博的良好渠道。
![图片1.png](/../../upload/image/20220305/6378207131018504322101904.png)
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图1 MEMS光学原位传感器件
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图2 光波导光学微腔
![图片5.png](/../../upload/image/20220305/6378207172693333038849099.png)
图3 热-声-振一体化结构工艺流程
学术交流及学生荣誉:
研究生具有参加国内/国际会议机会,毕业均有SCI论文,多人获得国家奖学金、三好学生、优秀毕业生等荣誉称号,具有较好的发展空间。
![图片6.png](/../../upload/image/20220305/6378207179767833725167909.png)
![图片7.png](/../../upload/image/20220305/6378207180289219816778097.png)
![图片8.png](/../../upload/image/20220305/6378207181362177334197999.png)
![图片10.png](/../../upload/image/20220305/6378207185970655801249889.png)
![图片10.png](/../../upload/image/20220305/6378207185970655801249889.png)
代表性成果:
Chen Chen, Yongqiu Zheng*, Jiamin Chen, Liyun Wu, Xinyu Zhao, Chenyang Xue. Full investigation of frequency locking loop model for high-Q Fabry-Perot cavity acoustic sensor, Optics and Laser Technology, 2021, 139: 106976.
Jiamin Chen, Yongqiu Zheng *, Chenyang Xue, Chengfei Zhang, Yi Chen. Filtering effect of SiO2 optical waveguide ring resonator applied to optoelectronic oscillator, Optics Express, 2018, 26(10): 12638-12647.
Jiamin Chen, Chenyang Xue, Yongqiu Zheng*, Liyun Wu, Chen Chen, Yuan Han, Micro-fiber-optic acoustic sensor based on high-Q resonance effect using Fabry-Perot etalon, Optics Express, 2021, 29(11): 16447-16454.
Liyun Wu, Yongqiu Zheng*, Chenyang Xue, Jiandong Bai, Jiamin Chen. An Optical Acoustic Detection System Based on Fabry Pérot Etalon Stability Structure, Micromachines, 2021, 12: 1564.
Liyun Wu, Yongqiu Zheng*, Chenyang Xue, Jiandong Bai, Jiamin Chen. Analysis and Optimization of Acoustic Sensor Based on Fiber Fabry-Pérot Etalon, IEEE SENSORS JOURNAL, 2022, 22(5): 4106-4112.